My wife somewhat continuously had perioral dermatitis (literally inflammation of skin around the mouth) until she changed her mask to a cloth mask. This appeared as raised bumps. Hers wasn't itchy, but any allergic response certainly could be.
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She's doing fine with the CPAP therapy now. Without the cloth mask, She was continually getting perioral dermatitis (a rash around the mouth), and a rash anywhere the silicone oxygen tube touched her skin.
To eliminate the silicone, she also had to change out the nose pads on her glasses with polycarbonate pads, and remove her IUD. If someone has a silicone allergy (and it's real, not imagined – we've done several challenge / response trials with silicone for her), they really need to get rid of any exposure.
Her response is interesting: it starts with a rash (no anaphylaxis), and then all of her joints swell up. For her, it triggers an autoimmune response that only goes away with Prednisone.
My wife is allergic to silicone. She wears the SleepWeaver Anew, an all-cloth mask, and has no trouble with it. It's available online and from some medical supply stores.
It's really a hassle, since almost all respiratory stuff is made of silicone. We wrap the oxygen tubing in tape to prevent contact.